Dr. Toru Tojo
Senior Manager at Topcon Corp
SPIE Involvement:
Publications (22)

SPIE Journal Paper | 1 October 2008
JM3, Vol. 7, Issue 04, 043010, (October 2008) https://doi.org/10.1117/12.10.1117/1.3013458
KEYWORDS: Inspection, Light, Spatial coherence, Optical inspection, Light sources, Photomasks, Imaging systems, Optical components, Transmittance, Neptunium

Proceedings Article | 24 March 2008 Paper
Proceedings Volume 6922, 692229 (2008) https://doi.org/10.1117/12.772359
KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Optical inspection, Wafer-level optics, Diffraction, Scanners, Computer aided design, Resolution enhancement technologies, Defect inspection

SPIE Journal Paper | 1 October 2007
Takashi Takahashi, Toshiki Okumura, Etsuya Suzuki, Tatsuya Kojima, Hitoshi Suzuki, Toru Tojo, Koji Machida
JM3, Vol. 6, Issue 04, 043010, (October 2007) https://doi.org/10.1117/12.10.1117/1.2804125
KEYWORDS: Cements, Deep ultraviolet, Adhesives, Transmittance, Objectives, Inspection, Microscopes, Fluorine, Lamps, Excimer lasers

Proceedings Article | 5 April 2007 Paper
Proceedings Volume 6518, 65184B (2007) https://doi.org/10.1117/12.711286
KEYWORDS: Inspection, Integrated optics, Photomasks, Image sensors, Defect inspection, Image quality, Imaging systems, Image processing, Lenses, Image acquisition

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 615245 (2006) https://doi.org/10.1117/12.655978
KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Diffraction, Defect detection, Computer aided design, Optical proximity correction, Binary data, Wafer inspection, Chromium

Showing 5 of 22 publications
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