In this study, a new display device based on physical contact and evanescent coupling is developed. The device consists of a glass substrate as a waveguide and electrostatically-driven multi-cantilevers on a silicon substrate. The incident light guided into the waveguide is transferred into the cantilevers due to the physical contact and the evanescent coupling between the waveguide and the multi-cantilevers when a voltage is applied. By the contact, the switched light is emitted from the side-edge of the contacted multi-cantilevers. The widely emitted output-light is realized by the integration of the cantilevers and the simplified structure. Therefore, the device is expected as the display application. The device is fabricated using MEMS process and bonding process. From the experimental results, a contrast of 0.9 is obtained at 170V, and the stable drive is attained up to 1KhZ. As a result, the usefulness of the device structure is confirmed.
Two types of electrostatically driven optical switching devices have been developed in this paper. An interferometric optical switching device realizes selective wavelength filtering by the interference of lightwaves between two half mirrors. Also, an evanescent coupling surface-output optical switching device realizes on-off switching by evanescent coupling and physical contact. Their basic characteristics are experimentally evaluated. By integrating these devices on a substrate, switching devices with wavelength filtering and on-off switching are proposed.
Measurement of periodical contact force of the tapping stylus is very important for performance evaluation of soft material profilometry. So far, simulations are perfomred to estimate the force, and force calibration cantilevers are used to measure small contact force of AFMs. Since the tappign stylus uses larger tappign force compared to AFMs, micro cantilevers made of glass are developed for the force measuremetn of range from mN to μN.The levers are calibrated by using a standard cantilever made of silicon,which is fabricated by a micromachining process. A laser interferometre system is used for the calibration of glass cantilever spring constant. A laser Doppler vibrometer is used to measure the velocity of the cantilevers, and the force is estimated from the velocity signal by an integration.
A new display device based on a micro-Fizeau interferometer (IDD: Interferometric Display Device) is proposed and trially manufactured. The mirror is suspended by leaf-springs so that it may move vertically when driven by a dc voltage - electrostatic force. The optical path difference between the half mirror and the bottom substrate is adjusted by the voltage, resulting in the optical interference. Contrast in the IDD can be changed by the voltage, and color can be displayed in the case of white light source. A 300micrometer-square half mirror made of SiO2 and Si substrate electrode/mirror is used for the construction of the IDD. A 4 by 4 array of the IDD is fabricated by using a bonding technique. An interferometric pattern in observed at a driving voltage of 200V dc. The frequency response of the device is confirmed more than 100Hz. The display quality is not sufficient at present because of the deformation of the half-mirror, however, it has a potential for lower driving energy and higher intensity of the pixels.
We have measured the Faraday effect of cobalt polycrystalline foil near cobalt K-absorption edge with the energy-tunable x-ray polarimeter. The Kramers-Kronig (K-K) relation between spectrum of the Faraday rotation and magnetic circular dichroism measured by using the ellipticity polarized synchrotron x-radiation has been confirmed. Furthermore, we have constructed, a new type of x-ray polarimeter with a diamond phase retarder and measured x-ray linear dichroism (LD) and linear birefringence (LB) simultaneously using an hcp cobalt single crystal foil. The K-K relation between LD and LB has also been confirmed clearly.
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