CONFERENCE PROCEEDINGS
Advanced Search
Toshifumi Honda
at Hitachi Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 15 November 2007 Paper
Fuzzy selective voting classifier with defect extraction based on comparison within an image
Toshifumi Honda, Ryo Nakagaki, Obara Kenji, Yuji Takagi
Proceedings Volume 6788, 67881Z (2007) https://doi.org/10.1117/12.750528
KEYWORDS: Inspection, Particles, Algorithm development, Semiconducting wafers, Feature extraction, Detection and tracking algorithms, Fuzzy logic, Defect detection, Image processing, Semiconductors
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top