Toshifumi Honda
at Hitachi Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 November 2007
Proc. SPIE. 6788, MIPPR 2007: Pattern Recognition and Computer Vision
KEYWORDS: Semiconductors, Defect detection, Detection and tracking algorithms, Image processing, Particles, Inspection, Feature extraction, Algorithm development, Semiconducting wafers, Fuzzy logic

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