Dr. Toshihiro Oga
Deputy General Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Semiconductors, Optical components, Lithography, Light sources, Metrology, Deep ultraviolet, Spectroscopy, Deconvolution, Laser spectroscopy, Photomasks

Proceedings Article | 18 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Wafer-level optics, Optical design, Electrodes, Manufacturing, Image resolution, Process control, Immersion lithography, Semiconducting wafers, Optics manufacturing, Yield improvement

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Semiconductors, Lithography, Light sources, Optical lithography, Deep ultraviolet, Immersion lithography, Optical aberrations

Proceedings Article | 26 April 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Wafer-level optics, Optical systems, Chromatic aberrations, Lithography, Optical design, Light sources, Projection systems, Immersion lithography, Optical proximity correction, Semiconducting wafers

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Light sources, Computer simulations, Laser stabilization, Optical simulations, Laser cutting, Logic devices, SRAF, Critical dimension metrology, Tolerancing, Combined lens-mirror systems

Showing 5 of 12 publications
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