Dr. Toshihisa Nozawa Profile

Dr. Toshihisa Nozawa

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 March 2015 Paper

Toshihisa Nozawa, Ryo Miyama, Shinji Kubota, Kazuki Moyama, Tomihiro Kubota, Seiji Samukawa

Proceedings Volume 9428, 94280N (2015) https://doi.org/10.1117/12.2178327

KEYWORDS: Etching, Magnetism, Plasma, Platinum, Transition metals, Argon, Reactive ion etching, Gases, Plasma generation, Semiconducting wafers

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Keywords/Phrases