Dr. Toshihisa Tomie
at AIST
SPIE Involvement:
Author
Publications (33)

SPIE Journal Paper | 21 May 2012
JM3 Vol. 11 Issue 02
KEYWORDS: Plasma, Extreme ultraviolet, Tin, Extreme ultraviolet lithography, Xenon, Magnetism, Opacity, Pulsed laser operation, Gas lasers, Ions

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Multilayers, Defect detection, Imaging systems, Particles, Inspection, Atomic force microscopy, Scanning electron microscopy, Photomasks, Extreme ultraviolet lithography, Defect inspection

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Signal to noise ratio, Mirrors, Defect detection, Imaging systems, Inspection, Image quality, Photomasks, Charge-coupled devices, Extreme ultraviolet lithography, EUV optics

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Mirrors, Multilayers, Light sources, Defect detection, Inspection, Photomasks, Extreme ultraviolet, Charge-coupled devices, EUV optics, Defect inspection

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Point spread functions, Mirrors, Multilayers, Defect detection, Imaging systems, Light scattering, Inspection, Surface roughness, Photomasks, Extreme ultraviolet lithography

Proceedings Article | 5 June 2008
Proc. SPIE. 7022, Advanced Laser Technologies 2007
KEYWORDS: Resonators, X-rays, X-ray sources, Laser applications, Amplifiers, Thermal effects, Optical pumping, Rod lasers, Pulsed laser operation, Cryogenics

Showing 5 of 33 publications
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