Toshiro Mabuchi
Assistant Manager at Tokuyama Corp
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Crystals, X-rays, Ions, Doping, Transmittance, Absorbance, Vacuum ultraviolet, Fluorine, Binary data, Absorption

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Optical components, Birefringence, Annealing, Crystals, Calcium, Finite element methods, Nonlinear crystals, Stress analysis, Crystallography, Temperature metrology

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Refractive index, Transparency, Magnesium fluoride, Crystals, Transmittance, Immersion lithography, Laser crystals, Vacuum ultraviolet, Crystallography

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Refractive index, Transparency, Scattering, Annealing, Crystals, Laser induced fluorescence, Transmittance, Excimer lasers, Immersion lithography, Vacuum ultraviolet

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Diffraction, Refractive index, Deep ultraviolet, Optical properties, Reflection, Crystals, X-rays, X-ray diffraction, Laser crystals, Single crystal X-ray diffraction

Showing 5 of 6 publications
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