Mr. Toshiya Umeda Profile

Toshiya Umeda

Executive Manager/Development at Adhand Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 14 November 2007 Paper

T. Umeda, H. Kawashima, T. Miho, K. Moriya

Proceedings Volume 6730, 67304Q (2007) https://doi.org/10.1117/12.746358

KEYWORDS: Air contamination, Polymethylmethacrylate, Neodymium, Photomasks, Polymers, Carbon, Ions, Chemical analysis, Particle filters, Composites

Proceedings Article | 28 June 2005 Paper

Toshiya Umeda, Hideaki Kawashima

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617128

KEYWORDS: Reticles, Particles, Photomasks, Contamination, Inspection, Scanners, Glasses, Air contamination, Polymers, Adhesives

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