We searched for low-outgassing and electroconductive polymer, found that polycarbonate with carbon fiber
(PC+CF) was good material as mask case. The amount of gas generation from PC+CF was less than 1/10 of the
conventional PMMA material. We also measured the performance of chemical absorbent (PureAID®) too. This
absorbent was effective in removing generated carbon gas from the case and penetrated acid, base and carbon (ABC)
gasses into it. The PureAID® mainteined clean condition in the case while shipping and storage. Functional filter
was designed for mask shipping by air plane. The functional filter removed more than 90% ABC gasses. We
recommend that the case for mask protection from a haze should adopt low-outgassing polymer composition,
chemical absorbent and functional filter. RSP6025-A mask shipper and new concept of RSP150 are adopted these
In the field, each customer uses their owned designed reticle case as for shipping, storage. To modify the case is so expensive that it is very difficult to improve, especially in time respect.
At the blank suppliers, they ship their mask blanks packing into their owned designed multiple shipper, however the market needs single shipper with next generation blanks to prevent from particle and outgas of case material damage.
At the mask shops, most of them use MP567 (Trade mark of Dainichi Shoji K.K.) single case which was designed about 15 years ago to ship their products to their customers.
It is not designed for robot handling, so contamination from manual handling makes reticle damaged.
Adhesive tape is also required to seal it, so chemical contamination will be occurred on quartz glass, i.e. haze.
At the IC fabs, scanner case such as Nikon, Canon and ASML case is the most common in their process. However these cases are not airtight, so they cannot be handled under class 10000 circumstances.
RSP (Reticle SMIF Pod) is airtight case and has a capability of automatic transportation, however it is very expensive compared to other cases.
We develop new mask case named Universal Reticle Pod (URP) at affordable price so as to be used as shipping, storage and process case, so we would like to report its performance in this paper.