Prof. Toshiyuki Horiuchi
Professor at Tokyo Denki Univ
SPIE Involvement:
Conference Chair | Symposium Chair | Conference Co-Chair | Conference Program Committee | Author | Editor
Publications (19)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Reticles, Optical lithography, Etching, Lamps, Printing, Photomasks, Wet etching, 3D scanning, Cylindrical lenses

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Optical lithography, Etching, Scientific research, Edge roughness

PROCEEDINGS ARTICLE | September 5, 2017
Proc. SPIE. 10372, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems III
KEYWORDS: Lithography, Optical lithography, Visual analytics, Visualization, Diffusion, Epoxies, Chemical analysis, Liquids

PROCEEDINGS ARTICLE | July 13, 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Etching, Ultrasonics, Projection systems, Aluminum

PROCEEDINGS ARTICLE | July 13, 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Optical lithography, Printing, Semiconducting wafers, Electroplating

PROCEEDINGS ARTICLE | July 13, 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Optical lithography, Printing, Wet etching

Showing 5 of 19 publications
Conference Committee Involvement (9)
Photomask Japan 2008
16 April 2008 | Yokohama, Japan
Photomask and NGL Mask Technology XV
16 April 2008 | Yokohama, Japan
Photomask and Next Generation Lithography Mask Technology XIV
17 April 2007 | Yokohama, Japan
Photomask and Next-Generation Lithography Mask Technology XIV
17 April 2007 | Yokohama, Japan
Photomask and Next-Generation Lithography Mask Technology XIII
18 April 2006 | Yokohama, Japan
Showing 5 of 9 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top