Traci L. Batchelder
Senior Engineer at Samsung Austin Semiconductor LLC
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Diffractive optical elements, Polymers, Particles, Molecules, Coating, Manufacturing, Photoresist materials, Semiconducting wafers, Liquids, Bottom antireflective coatings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top