Dr. Tracy W. Huang
at
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Reticles, Magnesium, Contamination, Quartz, Air contamination, Crystals, Inspection, Photomasks, Semiconducting wafers, Crystallography

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Lithography, Reticles, Contamination, Defect detection, Inspection, Wafer inspection, Photomasks, Critical dimension metrology, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | October 25, 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Reticles, Contamination, Defect detection, Sensors, Quartz, Crystals, Inspection, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | May 29, 2007
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Lithography, Reticles, Contamination, Defect detection, Sensors, Air contamination, Inspection, Transmittance, Photomasks, Semiconducting wafers

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