Dr. Trey Graves
at KLA-Tencor Texas
SPIE Involvement:
Author
Publications (26)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Lithography, Computer simulations, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Stochastic processes, Chemically amplified resists

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Data modeling, Scattering, Calibration, Organic materials, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Modeling and simulation, Stochastic processes, Inorganic hybrid materials, Absorption

PROCEEDINGS ARTICLE | October 3, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Code division multiplexing, Lithography, Diffraction, Reticles, Optical lithography, Lithographic illumination, Scanners, Photomasks, Artificial intelligence, Nanoimprint lithography

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Metrology, Optical lithography, 3D acquisition, Calibration, Manufacturing, Inspection, Computer simulations, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Critical dimension metrology, Photoresist processing, Stochastic processes

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Data modeling, Calibration, 3D modeling, Scanning electron microscopy, Process control, Directed self assembly, Optimization (mathematics), Systems modeling

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Deep ultraviolet, Electrons, Photomasks, Extreme ultraviolet, Transistors, Extreme ultraviolet lithography, Optical proximity correction, Nanoimprint lithography, Critical dimension metrology, Fin field effect transitor

Showing 5 of 26 publications
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