Dr. Troy Ribaudo Profile

Dr. Troy Ribaudo

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Publications (9)

Proceedings Article | 10 April 2024 Presentation + Paper

Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology

Nick Keller, Marc Poulingue, Ross Grynko, Troy Ribaudo, G. Andrew Antonelli, Victor Li, Marcello Ravasio, Delphine Le Cunff

Proceedings Volume 12955, 1295514 (2024) https://doi.org/10.1117/12.3010926

KEYWORDS: Simulations, Semiconducting wafers, Metrology, Nondestructive evaluation, Etching, Process control, Scatterometry

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Proceedings Article | 27 April 2023 Presentation + Paper

Measurement of W-recess profile in advanced node 3D NAND device with IRCD technology utilizing a specialized design-rule compliant target

Nick Keller, Zhuo Chen, Peter Wang, Rostislav Grynko, Troy Ribaudo, G. Andrew Antonelli, Youcheng Wang, Joshua Frederick, Sadao Takabayashi, John Hauck, Dan Engelhard

Proceedings Volume 12496, 124961Z (2023) https://doi.org/10.1117/12.2657719

KEYWORDS: Simulations, Metals, Finite-difference time-domain method, 3D acquisition, 3D metrology, Semiconducting wafers, Etching, Electric fields, Dielectrics, Plasmonics

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Proceedings Article | 26 May 2022 Presentation + Paper

Novel inline on-device measurement of silicon nitride lateral recess post channel hole ACI with IRCD metrology

Nick Keller, Wenmei Ming, Zhuo Chen, G. Andrew Antonelli, Troy Ribaudo, Zhuan Liu, Sadao Takabayashi, John Hauck, Joshua Frederick, Dan Engelhard

Proceedings Volume 12053, 120530T (2022) https://doi.org/10.1117/12.2618035

KEYWORDS: Silicon, Etching, Metrology, Semiconducting wafers, Mid-IR, Diffractive optical elements, Silica, Scattering, Critical dimension metrology, Absorption

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SPIE Journal Paper | 4 April 2022

Decorrelation of optical critical dimensions in mid-infrared ellipsometric spectroscopy of high aspect ratio etch profiles

Ahmad Fumani, Bin Yan, Nick Keller, G. Andrew Antonelli, Troy Ribaudo

JM3, Vol. 21, Issue 02, 021205, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021205

KEYWORDS: Mid-IR, Etching, Critical dimension metrology, Silicon, Spectroscopy, Finite-difference time-domain method, Superlattices, Absorption, Refractive index, Polarization

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Proceedings Article | 22 February 2021 Presentation + Paper

Ellipsometric critical dimension metrology employing mid-infrared wavelengths for high-aspect-ratio channel hole module etch processes

G. Andrew Antonelli, Nick Keller, Troy Ribaudo, Franklin Wong, Wenmei Ming, Hepeng Ding, Zhuo Chen, Ross Grynko, Ahmad Fumani, Zhuan Liu, Sadao Takabayashi, John Hauck, Joshua Frederick, Dan Engelhard, Bo Hui Ng, Biow Hiem Ong, Luey Chwan Liong

Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

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Proceedings Article | 11 September 2010 Paper

Active mid-infrared plasmonic beam steering devices

D. Adams, T. Ribaudo, S. Thongrattanasiri, E. Shaner, V. Podolskiy, D. Wasserman

Proceedings Volume 7756, 775616 (2010) https://doi.org/10.1117/12.859285

KEYWORDS: Plasmonics, Mid-IR, Beam steering, Gallium arsenide, Interfaces, Surface plasmons, Semiconductors, Dielectrics, Metals, Quantum cascade lasers

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Proceedings Article | 11 September 2010 Paper

Mid-infrared surface plasmon coupled emitters utilizing intersublevel transitions in InAs quantum dots

Eric Shaner, Brandon Passmore, David Adams, Troy Ribaudo, Stephen Lyon, Weng Chow, Daniel Wasserman

Proceedings Volume 7756, 77560Q (2010) https://doi.org/10.1117/12.861060

KEYWORDS: Metals, Mid-IR, Quantum dots, Surface plasmons, Indium arsenide, Electroluminescence, Gallium arsenide, Quantum cascade lasers, Reflection, Instrument modeling

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Proceedings Article | 12 February 2010 Paper

Mid-infrared emitters utilizing intersublevel transitions in self assembled InAs quantum dots

T. Ribaudo, B. Passmore, D. Adams, X. Qian, S. Vangala, W. Goodhue, E. Shaner, S. Lyon, D. Wasserman

Proceedings Volume 7616, 76161A (2010) https://doi.org/10.1117/12.843033

KEYWORDS: Mid-IR, Electroluminescence, Quantum dots, Plasmonics, Quantum cascade lasers, Gallium arsenide, Indium arsenide, Quantum wells, Electrons, Heterojunctions

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Proceedings Article | 12 February 2009 Paper

Active control of propagating waves on plasmonic surfaces

T. Ribaudo, E. Shaner, S. Howard, C. Gmachl, X. Wang, F.-S. Choa, D. Wasserman

Proceedings Volume 7221, 72210P (2009) https://doi.org/10.1117/12.809614

KEYWORDS: Mid-IR, Plasmonics, Light wave propagation, Quantum cascade lasers, Metals, Wave propagation, FT-IR spectroscopy, Gallium arsenide, Interfaces

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Showing 5 of 9 publications

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