Dr. Tsai-Wei Wu
Research Staff Member at HGST
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Oxides, Lithography, Electron beam lithography, Sensors, Etching, Silicon, Magnetism, Scanning electron microscopy, Head, Beam propagation method

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