Mr. Tsugihiko Haga Profile

Tsugihiko Haga

at TASMIT Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 March 2020 Paper

Yosuke Okamoto, Shinichi Nakazawa, Akinori Kawamura, Tsugihiko Haga, Taihei Mori, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki

Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

KEYWORDS: Edge detection, Scanning electron microscopy, Precision measurement, Machine learning, Computer aided design

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Keywords/Phrases