Dr. Tsukasa Abe
at Dai Nippon Printing Co Ltd
SPIE Involvement:
Publications (37)

Proceedings Article | 12 June 2018
Proc. SPIE. 10807, Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Chromium, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, SRAF, Tantalum

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Microscopes, Multilayers, Reflectivity, Image quality

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Multilayers, Defect detection, Quartz, Coating, Inspection, Photomasks, Extreme ultraviolet, Scanning probe microscopy, Semiconducting wafers, Signal detection

SPIE Journal Paper | 21 August 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Phase measurement, Photomasks, Semiconducting wafers, Critical dimension metrology, Extreme ultraviolet, Extreme ultraviolet lithography, Signal detection, Inspection, Quartz, Lithography

Proceedings Article | 13 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Quartz, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Scanning probe microscopy, Phase measurement, Critical dimension metrology, Semiconducting wafers

Showing 5 of 37 publications
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