Dr. Tsunehito Kohyama
at Lasertec Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Wafer-level optics, Lithography, Metrology, Inspection, Optical metrology, Process control, Finite element methods, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Optics manufacturing, Defect inspection

PROCEEDINGS ARTICLE | July 28, 2008
Proc. SPIE. 7013, Optical and Infrared Interferometry
KEYWORDS: Telescopes, Mirrors, Fringe analysis, Interferometers, Cameras, Sensors, Far infrared, Charge-coupled devices, Spatial resolution, CCD image sensors

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