Tsuneo Yamashita
at Daikin Industries Ltd
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Rutherfordium, Quartz, Ultraviolet radiation, Silicon, Printing, Acquisition tracking and pointing, Nanoimprint lithography, Fluorine, Semiconducting wafers

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Quartz, Polymers, Interfaces, Indium, Silicon, Printing, Nanoimprint lithography, Fluorine, Semiconducting wafers

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Deep ultraviolet, Chemical species, Polymers, Materials processing, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Fluorine, Absorption

Proceedings Article | 4 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Polymers, Water, Spectroscopy, Hydrogen, Surface properties, Polymerization, Infrared radiation, Immersion lithography, Manganese, Absorption

Proceedings Article | 30 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Refractive index, Antireflective coatings, Transparency, Quartz, Polymers, Water, Reflectivity, Fluorine, Standards development

Showing 5 of 13 publications
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