Mr. Tsuyoshi Fujimura
at Kyushu Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Semiconductors, Microfluidics, Electrodes, Capillaries, Glasses, Image processing, Chemical analysis, Confocal laser scanning microscopy, Microfabrication

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Gold, Polymethylmethacrylate, Polymers, Metals, Silicon, Coating, Photoresist materials, Plating, Semiconducting wafers, Electroplating

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