Tsuyoshi Kajiyashiki
Project Manager at Kuraray Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Carbon, Chemical species, Polymers, Sulfur, Hydrogen, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Absorption

PROCEEDINGS ARTICLE | April 15, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Oscillators, Quartz, Chemical species, Polymers, Spectroscopy, Crystals, Oxygen, Polymerization, Chemical analysis

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top