Tsuyoshi Ogawa
Research Engineering at Central Glass Co Ltd
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | September 24, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Lithography, Head-mounted displays, Glasses, Optical lithography, Microfluidics, Nanoimprint lithography, Interfaces, Natural surfaces, Chemistry, Failure analysis

PROCEEDINGS ARTICLE | April 4, 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Lithography, Optical lithography, Glasses, Interfaces, Silicon, Nanoimprint lithography, Head-mounted displays, Fluorine, Adhesives, Information operations

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Etching, Ultraviolet radiation, Silicon, Coating, Oxygen, Scanning electron microscopy, Epoxies, Silicon carbide, Liquids

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Electron beam lithography, Etching, Ultraviolet radiation, Silicon, Resistance, Oxygen, Photomasks, Nanoimprint lithography, Photoresist processing

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