Tsuyoshi Ogawa
Research Engineering at Central Glass Co Ltd
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 24 September 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Lithography, Head-mounted displays, Glasses, Optical lithography, Microfluidics, Nanoimprint lithography, Interfaces, Natural surfaces, Chemistry, Failure analysis

Proceedings Article | 4 April 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Lithography, Optical lithography, Glasses, Interfaces, Silicon, Nanoimprint lithography, Head-mounted displays, Fluorine, Adhesives, Information operations

Proceedings Article | 3 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Etching, Ultraviolet radiation, Silicon, Coating, Oxygen, Scanning electron microscopy, Epoxies, Silicon carbide, Liquids

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Electron beam lithography, Etching, Ultraviolet radiation, Silicon, Resistance, Oxygen, Photomasks, Nanoimprint lithography, Photoresist processing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top