Tuncay Alan
at Technische Univ Delft
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Microresonators, Oscillators, Modulation, Resonators, Interferometry, Domes, Positive feedback, Signal detection, Phase shifts

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