Tuomas Vainikka
at Univ of Helsinki
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Microscopes, Diffraction, Finite-difference time-domain method, Super resolution, Optical spheres, Light scattering, Monte Carlo methods, Near field, Objectives, Device simulation

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Diffraction, Super resolution, Optical spheres, Polymers, Glasses, Interferometry, 3D modeling, Monte Carlo methods, Objectives, Semiconducting wafers

Proceedings Article | 7 November 2018 Paper
Proc. SPIE. 10819, Optical Metrology and Inspection for Industrial Applications V
KEYWORDS: Mirrors, Metrology, 3D imaging standards, Calibration, Time metrology, Solids, 3D metrology, Neodymium, Standards development, 3D image processing

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Microscopes, MATLAB, Diffractive optical elements, Modulation, Photoresist materials, 3D metrology, Photomasks, Source mask optimization, Semiconducting wafers, Multiphoton lithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top