Dr. Turgut Sahin
at Etec Systems Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Metrology, Deep ultraviolet, Interferometers, Etching, Quartz, Scanning electron microscopy, Process control, Photomasks, Phase measurement, Phase shifts

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Signal to noise ratio, Principal component analysis, Calibration, Etching, Spectroscopy, Chromium, Neural networks, Photomasks, Charge-coupled devices, Photoresist processing

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Diffractive optical elements, Data modeling, Etching, Dry etching, Photomasks, Critical dimension metrology, Chlorine, Semiconducting wafers, Prototyping

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