Prof. John Yeow
at Univ of Waterloo
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV
KEYWORDS: Microscopes, Microfluidics, BioMEMS, Resonators, Glasses, Particles, Ultrasonics, Transducers, Pathogens, Microfabrication, Acoustics, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | February 16, 2007
Proc. SPIE. 6443, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XIV
KEYWORDS: Mirrors, Imaging systems, Microscopy, Image resolution, Adaptive optics, Spatial light modulators, Relays, Charge-coupled devices, Digital micromirror devices, Resolution enhancement technologies

PROCEEDINGS ARTICLE | February 17, 2003
Proc. SPIE. 4833, Applications of Photonic Technology 5
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Biomedical optics, Electrodes, Scanners, Silicon, Photoresist materials, Micromirrors, Deep reactive ion etching

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Switches, Etching, Silicon, Aluminum, Deep reactive ion etching, Reactive ion etching, Semiconducting wafers

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