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Tzy-Kuang Lee
Senior Engineer at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (1)
Proceedings Article | 26 June 2003 Paper
Precision control of poly-gate CD by local OPC for elimination of microloading effect on 0.13-um CMOS technology
Tzy-Kuang Lee, Yao-Ching Wang, Min-hwa Chi, C. Lu, C. Hsieh, R. Liu, H. Liao, S. Yang, Chih-Hao Chang
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485250
KEYWORDS: Optical proximity correction, Transistors, Critical dimension metrology, Etching, CMOS technology, Photomasks, Amplifiers, Optical lithography, Semiconducting wafers, Silicon
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