Dr. Udo Dinger
Principal Scientist at Carl Zeiss SMT GmbH
SPIE Involvement:
Conference Program Committee | Conference Chair | Author
Publications (14)

Proceedings Article | 13 June 2006
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Point spread functions, Mirrors, Metrology, Image segmentation, Glasses, Error analysis, X-rays, Manufacturing, Profilometers, Spatial resolution

Proceedings Article | 8 September 2005
Proc. SPIE. 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
KEYWORDS: Mirrors, Polishing, Metrology, Glasses, X-rays, Ceramics, Manufacturing, Ion beams, Spatial resolution, Ion beam finishing

Proceedings Article | 18 October 2004
Proc. SPIE. 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
KEYWORDS: Diffraction, Mirrors, Imaging systems, Interferometers, Calibration, Error analysis, Wavefronts, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 11 October 2004
Proc. SPIE. 5488, UV and Gamma-Ray Space Telescope Systems
KEYWORDS: Observatories, Calibration, X-rays, Solids, Spatial resolution, X-ray imaging, Microwave radiation, X-ray telescopes, Astrophysics, Galaxy groups and clusters

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Diffraction, Mirrors, Reticles, Imaging systems, Electroluminescence, Photomasks, Extreme ultraviolet lithography, Nanoimprint lithography, Critical dimension metrology

Showing 5 of 14 publications
Conference Committee Involvement (4)
Optical Manufacturing and Testing VI
31 July 2005 | San Diego, California, United States
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
5 August 2004 | Denver, Colorado, United States
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
7 August 2003 | San Diego, California, United States
Optical Manufacturing and Testing V
3 August 2003 | San Diego, California, United States
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