Mr. Udo Triltsch
at Technische Univ Braunschweig
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 26, 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Microelectromechanical systems, Microsystems, Data modeling, Etching, 3D modeling, Microopto electromechanical systems, Computer aided design, TCAD, Process modeling, Device simulation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top