Dr. Ulf Griesmann Profile

Dr. Ulf Griesmann

SPIE Involvement:

Conference Program Committee | Author

Publications (28)

Proceedings Article | 4 October 2023 Presentation + Paper

Practical considerations in using a binary pseudorandom array for instrument transfer function calibration

P. Takacs, S. Rochester, I. Lacey, K. Munechika, U. Griesmann, V. Yashchuk

Proceedings Volume 12672, 126720K (2023) https://doi.org/10.1117/12.2677154

KEYWORDS: Microscopes, Modulation transfer functions, Aliasing, Cameras, Objectives, Calibration

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SPIE Journal Paper | 9 January 2023 Open Access

Fabrication error detection in diffraction gratings with high dynamic range Fourier plane imaging and spatial filtering

Sofia Corzo-Garcia, Ulf Griesmann

OE, Vol. 62, Issue 01, 014102, (January 2023) https://doi.org/10.1117/12.10.1117/1.OE.62.1.014102

KEYWORDS: Diffraction gratings, High dynamic range imaging, Fabrication, Cameras, Optical gratings, Equipment, Diffraction, Echelle gratings, Reflection gratings, Stray light

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Proceedings Article | 3 October 2022 Presentation + Paper

Characterization of surface texture-measuring optical microscopes using a binary pseudo-random array standard

Ulf Griesmann, Keiko Munechika, T. Brian Renegar, X. Alan Zheng, Johannes Soons, Thomas Germer, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Peter Takacs, Valeriy Yashchuk

Proceedings Volume 12223, 1222306 (2022) https://doi.org/10.1117/12.2633411

KEYWORDS: Microscopes, Spatial frequencies, Standards development, Confocal microscopy, Interferometry, Optical microscopes

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Proceedings Article | 21 August 2020 Paper

Binary pseudorandom array test standard optimized for characterization of large field-of-view optical interferometers

Valeriy Yashchuk, Sergey Babin, Stefano Cabrini, Weilun Chao, Ulf Griesmann, Ian Lacey, Stefano Marchesini, Keiko Munechika, Carlos Pina-Hernandez, Allen Roginsky

Proceedings Volume 11490, 114900W (2020) https://doi.org/10.1117/12.2568309

KEYWORDS: Modulation transfer functions, Fizeau interferometers, Calibration, Light sources, Interferometers, Spatial frequencies, Metrology, Zoom lenses, Binary data

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Proceedings Article | 20 August 2020 Presentation + Paper

A coronagraph for the sensing of fabrication errors in diffraction gratings

Sofia Corzo-Garcia, Ulf Griesmann

Proceedings Volume 11487, 114871G (2020) https://doi.org/10.1117/12.2568550

KEYWORDS: Diffraction gratings, Coronagraphy, High dynamic range imaging, Diffraction, Optical testing

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Proceedings Article | 4 September 2018 Presentation + Paper

A high dynamic range imaging method for the characterization of periodic errors in diffraction gratings

Sofia C. Corzo-Garcia, Muhammad Imran Afzal, Benjamin Kidder, Michelle Grigas, Ulf Griesmann

Proceedings Volume 10750, 1075009 (2018) https://doi.org/10.1117/12.2321227

KEYWORDS: Diffraction gratings, High dynamic range imaging, Diffraction, Lithography, Holograms, Stray light

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Proceedings Article | 18 August 2018 Paper

Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards

Valeriy Yashchuk, Sergey Babin, Stefano Cabrini, Ulf Griesmann, Ian Lacey, Keiko Munechika, Carlos Pina-Hernandez, Quandou Wang

Proceedings Volume 10749, 107490R (2018) https://doi.org/10.1117/12.2322011

KEYWORDS: Interferometers, Fizeau interferometers, Spatial frequencies, Modulation transfer functions, Visualization, Monochromatic aberrations

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SPIE Journal Paper | 14 July 2018

Infrared computer-generated holograms: design and application for the WFIRST grism using wavelength-tuning interferometry

Margaret Z. Dominguez, Catherine T. Marx, Qian Gong, John G. Hagopian, Ulf Griesmann, James H. Burge, Dae Wook Kim

OE, Vol. 57, Issue 07, 074105, (July 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.7.074105

KEYWORDS: Computer generated holography, Infrared radiation, Interferometers, Interferometry, Wavefronts, Optical design, Phase shifts, Infrared telescopes, Diffraction, Prototyping

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Proceedings Article | 9 August 2016 Paper

Wide-Field InfraRed Survey Telescope (WFIRST) slitless spectrometer: design, prototype, and results

Qian Gong, David Content, Margaret Dominguez, Thomas Emmett, Ulf Griesmann, John Hagopian, Jeffrey Kruk, Catherine Marx, Bert Pasquale, Thomas Wallace, Arthur Whipple

Proceedings Volume 9904, 990412 (2016) https://doi.org/10.1117/12.2231665

KEYWORDS: Prototyping, Spectroscopy, Optical design, Chemical elements, Interferometers, Computer generated holography, Wavefronts, Diffraction, Diffraction gratings, Collimation

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Proceedings Article | 22 July 2016 Paper

Process improvements in the production of silicon immersion gratings

Cynthia Brooks, Benjamin Kidder, Michelle Grigas, Ulf Griesmann, Daniel Wilson, Richard Muller, Daniel Jaffe

Proceedings Volume 9912, 99123Z (2016) https://doi.org/10.1117/12.2233388

KEYWORDS: Silicon, Lithography, Photoresist materials, Photomasks, Electron beam lithography, Manufacturing, Antireflective coatings, Chromium, Etching, Semiconducting wafers

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SPIE Journal Paper | 23 October 2013 Open Access

Versatile bilayer resist for laser lithography at 405 nm on glass substrates

Quandou Wang, Ulf Griesmann

OE, Vol. 52, Issue 10, 105104, (October 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.10.105104

KEYWORDS: Glasses, Lithography, Photoresist materials, Chromium, Reflectivity, Antireflective coatings, Computer generated holography, Refractive index, Photomasks, Optical lithography

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Proceedings Article | 7 September 2013 Paper

Holographic radius test plates

Quandou Wang, Johannes Soons, Ulf Griesmann

Proceedings Volume 8838, 88380I (2013) https://doi.org/10.1117/12.2024890

KEYWORDS: Optical spheres, Lenses, Spherical lenses, Interferometers, Wavefronts, Lens design, Confocal microscopy, Optical fabrication, Error analysis, Holography

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Proceedings Article | 13 September 2012 Paper

Calibrating the sag due to gravity of horizontal interferometer reference flats

Jan Burke, Ulf Griesmann

Proceedings Volume 8493, 84930F (2012) https://doi.org/10.1117/12.929968

KEYWORDS: Foam, Interferometers, Silicon, Calibration, Polymers, Polyurethane, Nanoimprint lithography, Glasses, Precision optics, Protactinium

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Proceedings Article | 13 September 2012 Paper

Absolute interferometric tests of spherical surfaces based on rotational and translational shears

Johannes Soons, Ulf Griesmann

Proceedings Volume 8493, 84930G (2012) https://doi.org/10.1117/12.930030

KEYWORDS: Error analysis, Optical spheres, Distortion, Spherical lenses, Interferometry, Wavefronts, Analytical research, Monochromatic aberrations, Interferometers, Monte Carlo methods

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SPIE Journal Paper | 1 September 2010

Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency

Jiyoung Chu, Quandou Wang, John Lehan, Guangjun Gao, Ulf Griesmann

OE, Vol. 49, Issue 09, 095601, (September 2010) https://doi.org/10.1117/12.10.1117/1.3488052

KEYWORDS: Interferometers, Mirrors, Spatial frequencies, Phase shifts, Sensors, Imaging systems, Optical engineering, Charge-coupled devices, Image resolution, Standards development

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Proceedings Article | 17 June 2009 Paper

Dual-CGH interferometry test for x-ray mirror mandrels

Guangjun Gao, John Lehan, Ulf Griesmann

Proceedings Volume 7389, 73891B (2009) https://doi.org/10.1117/12.830659

KEYWORDS: Computer generated holography, Mirrors, Metrology, X-rays, Interferometry, Spherical lenses, Interferometers, X-ray telescopes, Optical fabrication, Space telescopes

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SPIE Journal Paper | 1 June 2009

Computer-generated hologram cavity interferometry test for large x-ray mirror mandrels: design

Guangjun Gao, John Lehan, William Zhang, Ulf Griesmann, Johannes Soons

OE, Vol. 48, Issue 06, 063602, (June 2009) https://doi.org/10.1117/12.10.1117/1.3153303

KEYWORDS: Computer generated holography, Interferometers, Mirrors, Interferometry, Metrology, X-rays, Wavefronts, Optical engineering, Polarization, Optical design

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Proceedings Article | 11 August 2008 Paper

Measuring the phase transfer function of a phase-shifting interferometer

Jiyoung Chu, Quandou Wang, John Lehan, Guangjun Gao, Ulf Griesmann

Proceedings Volume 7064, 70640C (2008) https://doi.org/10.1117/12.795243

KEYWORDS: Spatial frequencies, Interferometers, Mirrors, Silica, Imaging systems, Chromium, Phase shifts, Modulation transfer functions, Photoresist materials, Lithography

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SPIE Journal Paper | 1 September 2007

Three-flat tests including mounting-induced deformations

Ulf Griesmann, Quandou Wang, Johannes Soons

OE, Vol. 46, Issue 09, 093601, (September 2007) https://doi.org/10.1117/12.10.1117/1.2784531

KEYWORDS: Wavefronts, Mirrors, Interferometers, Optical engineering, Calibration, Interferometry, Sensors, Metrology, Collimation, Error analysis

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Proceedings Article | 9 December 2005 Paper

Interferometric thickness calibration of 300 mm silicon wafers

Quandou Wang, Ulf Griesmann, Robert Polvani

Proceedings Volume 6024, 602426 (2005) https://doi.org/10.1117/12.666951

KEYWORDS: Semiconducting wafers, Interferometers, Refractive index, Silicon, Wafer-level optics, Silica, Manufacturing, Calibration, Infrared radiation, Wafer testing

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Proceedings Article | 20 August 2005 Paper

A simple ball averager for reference sphere calibrations

Ulf Griesmann, Quandou Wang, Johannes Soons, Remi Carakos

Proceedings Volume 5869, 58690S (2005) https://doi.org/10.1117/12.614992

KEYWORDS: Calibration, Wavefronts, Optical spheres, Interferometers, Spherical lenses, Computer simulations, Glasses, Solids, Standards development, Precision optics

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Proceedings Article | 18 August 2005 Paper

Uncertainties in aspheric profile measurements with the geometry measuring machine at NIST

Ulf Griesmann, Nadia Machkour-Deshayes, Johannes Soons, Byoung Kim, Quandou Wang, John Stoup, Lahsen Assoufid

Proceedings Volume 5878, 58780D (2005) https://doi.org/10.1117/12.615398

KEYWORDS: Sensors, Interferometers, Mirrors, Calibration, Aspheric lenses, Interferometry, Beam splitters, Imaging systems, Metrology, Spherical lenses

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Proceedings Article | 11 December 2003 Paper

Testing highly aberrated large optics with a Shack-Hartmann wavefront sensor

Daniel Neal, Paul Pulaski, Thomas Raymond, David Neal, Quandou Wang, Ulf Griesmann

Proceedings Volume 5162, (2003) https://doi.org/10.1117/12.510795

KEYWORDS: Semiconducting wafers, Wavefronts, Wavefront sensors, Optical testing, Wafer-level optics, Sensors, Mirrors, Turbulence, Interferometers, Silica

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Proceedings Article | 5 July 2000 Paper

Absolute index of refraction and its temperature dependence of calcium fluoride, barium fluoride, and strontium fluoride near 157 nm

John Burnett, Rajeev Gupta, Ulf Griesmann

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388989

KEYWORDS: Calcium, Refraction, Temperature metrology, Spectroscopy, Barium, Prisms, Visible radiation, Strontium, Refractive index, Vacuum ultraviolet

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Proceedings Article | 28 September 1999 Paper

NIST FT700 Vacuum Ultraviolet Fourier Transform Spectrometer: applications in ultraviolet spectrometry and radiometry

Ulf Griesmann, Rainier Kling, John Burnett, Lukasz Bratasz

Proceedings Volume 3818, (1999) https://doi.org/10.1117/12.364153

KEYWORDS: Spectroscopy, Fourier transforms, Lamps, Ultraviolet radiation, Vacuum ultraviolet, Argon, Spectral resolution, Interferometers, Data acquisition, Calibration

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Proceedings Article | 26 July 1999 Paper

Index of refraction and its temperature dependence of calcium fluoride near 157 nm

John Burnett, Rajeev Gupta, Ulf Griesmann, Ted Jou

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354324

KEYWORDS: Temperature metrology, Calcium, Refraction, Prisms, Spectroscopy, Lamps, Refractive index, Vacuum ultraviolet, Lens design, Optical lithography

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