Prof. Ulf Kleineberg Profile

Prof. Ulf Kleineberg

Full Professor/Researcher at Ludwig-Maximilians-Univ München

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Author

Publications (16)

Proceedings Article | 9 September 2019 Presentation + Paper

Lab-scale soft x-ray ptychography: advanced nanoscale imaging and beam diagnostics

M. Zürch, F. Tuitje, T. Helk, J. Gautier, F. Tissandier, J. -P. Goddet, E. Oliva, A. Guggenmos, U. Kleineberg, H. Stiel, S. Sebban, C. Spielmann

Proceedings Volume 11111, 111110F (2019) https://doi.org/10.1117/12.2532063

KEYWORDS: Plasma, Extreme ultraviolet, Diffraction, X-rays, Optical amplifiers, X-ray imaging

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Proceedings Article | 4 March 2019 Presentation + Paper

Following the plasma dynamics in a seeded soft x-ray laser with lensless imaging

F. Tuitje, T. Helk, M. Zürch, J. Gautier, F. Tissandier, J.-P. Goddet, E. Oliva, A. Guggenmos, U. Kleineberg, S. Sebban, C. Spielmann

Proceedings Volume 10903, 109030A (2019) https://doi.org/10.1117/12.2506610

KEYWORDS: Plasma, Mirrors, Picosecond phenomena, X-ray lasers, Extreme ultraviolet, Wave propagation, Diffraction, Ions, Wavefronts, Computational imaging

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Proceedings Article | 21 April 2016 Paper

Modulation of extraordinary optical transmission through nanohole arrays using ultrashort laser pulses

Kellie Pearce, Robin Dehde, Anika Spreen, Christian Späth, Maximilian Wendl, Jürgen Schmidt, Ulf Kleineberg

Proceedings Volume 9884, 98843H (2016) https://doi.org/10.1117/12.2228010

KEYWORDS: Surface plasmons, Modulation, Extraordinary optical transmission, Metals, Plasmonics, Plasmons, Diffraction, Interfaces, Biosensing, Photonic devices, Ultrafast phenomena, Gold, Femtosecond phenomena, Light

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Proceedings Article | 5 September 2014 Paper

Attosecond broadband multilayer mirrors for the water window spectral range

A. Guggenmos, S. Radünz, R. Rauhut, M. Hofstetter, S. Venkatesan, A. Wochnik, C. Scheu, E. Gullikson, S. Fischer, B. Nickel, U. Kleineberg

Proceedings Volume 9207, 92070L (2014) https://doi.org/10.1117/12.2061696

KEYWORDS: Mirrors, Interfaces, Polishing, Ion beams, Chromium, Scandium, Reflectivity, Transmission electron microscopy, Multilayers, X-ray optics

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Proceedings Article | 15 October 2012 Paper

Aperiodic multilayer mirrors for attosecond soft x-ray pulses

Alexander Guggenmos, Michael Hofstetter, Roman Rauhut, Bert Nickel, Eric Gullikson, Ulf Kleineberg

Proceedings Volume 8502, 850204 (2012) https://doi.org/10.1117/12.930762

KEYWORDS: Multilayers, X-rays, Mirrors, Reflectivity, Reflectometry, Extreme ultraviolet, Ion beams, Dispersion, X-ray characterization, Interfaces

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Proceedings Article | 9 October 2012 Paper

Spatiotemporal characterization and control of lightfield nanolocalization on metallic nanostructures by nonlinear-PEEM

S. H. Chew, K. Pearce, S. Nobis, C. Späth, A. Spreen, S. Radünz, Y. Yang, J. Schmidt, U. Kleineberg

Proceedings Volume 8457, 84571C (2012) https://doi.org/10.1117/12.930020

KEYWORDS: Silver, Nanostructures, Waveguides, Polarization, Surface plasmons, Gold, Semiconductor lasers, Plasmonics, Near infrared, Femtosecond phenomena

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Proceedings Article | 3 May 2007 Paper

Actinic inspection of sub-50 nm EUV mask blank defects

Jingquan Lin, Nils Weber, Jochen Maul, Stefan Hendel, Karsten Rott, Michael Merkel, Gerd Schoenhense, Ulf Kleineberg

Proceedings Volume 6533, 65331R (2007) https://doi.org/10.1117/12.736920

KEYWORDS: Extreme ultraviolet, Photomasks, Multilayers, Inspection, Extreme ultraviolet lithography, Wavefronts, Coating, Defect inspection, Defect detection, Distortion

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Proceedings Article | 23 March 2006 Paper

Actinic EUVL mask blank defect inspection by EUV photoelectron microscopy

Ulf Kleineberg, Jingquan Lin, Ulrich Neuhaeusler, Jawad Slieh, Ulrich Heinzmann, Nils Weber, Matthias Escher, Michael Merkel, Andreas Oelsner, Dima Valsaitsev, Gerd Schoenhense

Proceedings Volume 6151, 615120 (2006) https://doi.org/10.1117/12.659812

KEYWORDS: Photomasks, Extreme ultraviolet, Inspection, Extreme ultraviolet lithography, Defect inspection, Lithography, Multilayers, Microscopy, Silica, Reflectivity

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Proceedings Article | 20 December 2001 Paper

Bufferlayer and caplayer engineering of Mo/Si EUVL multilayer mirrors

Ulf Kleineberg, Thomas Westerwalbesloh, O. Wehmeyer, Michael Sundermann, Armin Brechling, Ulrich Heinzmann, Markus Haidl, Stefan Muellender

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450951

KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet, Silicon, Extreme ultraviolet lithography, Mirrors, Zerodur, Interfaces, Polishing, Carbon

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Proceedings Article | 23 November 1999 Paper

Lifetime studies of Mo/Si and Mo/Be multilayer coatings for extreme ultraviolet lithography

Marco Wedowski, Sasa Bajt, James Folta, Eric Gullikson, Ulf Kleineberg, Leonard Klebanoff, Michael Malinowski, W. Miles Clift

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371120

KEYWORDS: Multilayers, Extreme ultraviolet lithography, Reflectivity, Extreme ultraviolet, Optical coatings, Carbon, Ozone, Mirrors, Contamination, Optical components

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Proceedings Article | 3 November 1997 Paper

Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications

Ulf Kleineberg, Hans-Juergen Stock, D. Menke, O. Wehmeyer, Ulrich Heinzmann, Detlef Fuchs, Peter Bulicke, Marco Wedowski, Gerhard Ulm, Klaus Heidemann, K. Osterried

Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.283980

KEYWORDS: Multilayers, Diffraction gratings, Diffraction, Reflectivity, Coating, X-ray diffraction, X-rays, Interfaces, Mirrors, Synchrotron radiation

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Proceedings Article | 11 November 1994 Paper

Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region

Ulf Kleineberg, Hans-Juergen Stock, D. Menke, K. Osterried, Bernt Schmiedeskamp, Ulrich Heinzmann, Detlef Fuchs, Peter Mueller, Frank Scholze, Klaus Heidemann, Bruno Nelles, Juergen Thieme

Proceedings Volume 2279, (1994) https://doi.org/10.1117/12.193143

KEYWORDS: Multilayers, Diffraction gratings, Diffraction, Zone plates, X-rays, Reflectivity, Carbon, X-ray diffraction, Coating, X-ray optics

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Here we report on the fabrication and analysis of two different types of laterally structured multilayers, which act as highly efficient x-ray optical elements for focusing or spectral dispersion of soft x-rays at (near) normal incidence. The microfocusing of soft x-rays at (near) normal incidence with plane reflection optics can be obtained by multilayer Bragg-Fresnel zone plates. A circular condensor zone plate structure (2.9 mm diameter, 417 zones, inner zone radius 50 micrometers , outer zone width 0.9 micrometers ) has been recorded by holographic lithography followed by ion beam etching into a Mo-Si multilayer mirror of 24 periods and a doublelayer thickness of 7.2 nm. The focusing properties analyzed by soft x-ray reflectometry at (lambda) equals 13.8 nm show a focal spot size smaller than 40 micrometers measured 160 mm behind the multilayer zone plate. Multilayer blazed gratings offer the opportunity for highly resolved spectral dispersion of soft x-rays due to the possible combination of high efficiency and high diffraction orders with almost the whole intensity diffracted in one diffraction order. The sawtooth profile of a blazed grating structure (1221 l/mm, blaze angle 1.5 degree(s)) has been ruled into a 200 nm thick Au-film which has been deposited onto a plane glass substrate. A Mo/Si multilayer of 15 periods and a doublelayer thickness of 7.2 nm has been deposited onto the grating substrate. In order to smooth the rough Au-surface and to prevent interdiffusion of the Au-film with the upper Mo-Si multilayer a carbon film has been evaporated onto the Au-grating surface before the deposition of the soft x-ray coating. This procedure results in a significant increase of diffraction efficiency. The multilayer grating has been matched working on blaze in the third diffraction order, where an absolute diffraction efficiency of 3.4% at (lambda) equals 14 nm has been measured, while only 1.1% has been achieved for a similar grating without a carbon interlayer.

SPIE Journal Paper | 1 April 1994

Electron-beam-deposited Mo/Si and MoxSiy/Si multilayer x-ray mirrors and gratings

Bernt Schmiedeskamp, Andreas Kloidt, Hans-Juergen Stock, Ulf Kleineberg, Thorsten Doehring, Michael Proepper, Steffen Rahn, Kerstin Hilgers, Bernhard Heidemann, Thorsten Tappe, Ulrich Heinzmann, Michael Krumrey, Peter Mueller, Frank Scholze, Klaus Heidemann

OE, Vol. 33, Issue 04, (April 1994) https://doi.org/10.1117/12.10.1117/12.163207

KEYWORDS: Reflectivity, X-rays, Silicon, Diffraction gratings, Molybdenum, Mirrors, X-ray optics, Interfaces, Diffraction, Multilayers

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Proceedings Article | 21 January 1993 Paper

Fabrication, thermal stability, and reflectivity measurements of Mo/Si multilayers as x-ray mirrors and other optical components

Andreas Kloidt, Hans-Juergen Stock, Ulf Kleineberg, Thorsten Doehring, Michael Proepper, Kerstin Nolting, Bernhard Heidemann, Thorsten Tappe, Bernt Schmiedeskamp, Ulrich Heinzmann, Michael Krumrey, Peter Mueller, Frank Scholze, Steffen Rahn, F. Hormes, Klaus Heidemann

Proceedings Volume 1742, (1993) https://doi.org/10.1117/12.140592

KEYWORDS: Reflectivity, Mirrors, X-rays, Diffraction gratings, Interfaces, Silicon, Ions, Molybdenum, Multilayers, Diffraction

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Proceedings Article | 21 January 1993 Paper

Large-area soft x-ray projection lithography using multilayer mirrors structured by RIE

Steffen Rahn, Andreas Kloidt, Ulf Kleineberg, Bernt Schmiedeskamp, Klaus Kadel, Werner Schomburg, F. Hormes, Ulrich Heinzmann

Proceedings Volume 1742, (1993) https://doi.org/10.1117/12.140591

KEYWORDS: Photomasks, X-rays, Reflection, Mirrors, Reactive ion etching, Reflectivity, X-ray lithography, Synchrotron radiation, Projection lithography, X-ray optics

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Proceedings Article | 1 February 1991 Paper

Fabrication and characterization of Si-based soft x-ray mirrors

Bernt Schmiedeskamp, Bernhard Heidemann, Ulf Kleineberg, Andreas Kloidt, Mikhael Kuehne, H. Mueller, Peter Mueller, Kerstin Nolting, Ulrich Heinzmann

Proceedings Volume 1343, (1991) https://doi.org/10.1117/12.23179

KEYWORDS: Reflectivity, Silicon, X-rays, Reflection, X-ray optics, Synchrotron radiation, Interfaces, X-ray astronomy, Astronomical imaging, Astronomy

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Showing 5 of 16 publications

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