Ulf Weidenmueller
Manager Support Ctr at Vistec Electron Beam GmbH
SPIE Involvement:
Publications (21)

Proceedings Article | 18 June 2024 Paper
U. Weidenmüller, S. Fasold, E. Linn, I. Stolberg
Proceedings Volume 13012, 130120Q (2024) https://doi.org/10.1117/12.3017567
KEYWORDS: Semiconducting wafers, Lithography, Photomasks, Axicons, Semiconductor manufacturing, Waveguides, Line edge roughness, Optics manufacturing, Electron beam lithography

Proceedings Article | 9 April 2024 Poster + Paper
M. Greul, K. Edelmann, S. Fasold, J. Hartbaum, E. Linn, I. Stolberg, U. Weidenmueller
Proceedings Volume 12956, 129560N (2024) https://doi.org/10.1117/12.3010355
KEYWORDS: Waveguides, Electron beam lithography, Design, Integrated photonics, Fabrication, Silicon photonics, Photonics systems

Proceedings Article | 21 November 2023 Presentation + Paper
Ines Stolberg, Eike Linn, Ulf Weidenmueller, Matthias Slodowski
Proceedings Volume 12751, 127510K (2023) https://doi.org/10.1117/12.2688360
KEYWORDS: Electron beam lithography, Vestigial sideband modulation, Photonics, Lithography, Industrial applications, Reproducibility, Optics manufacturing, Optical gratings, Manufacturing, Geometrical optics

SPIE Journal Paper | 12 July 2023
Eike Linn, Stefan Fasold, Ines Stolberg, Ulf Weidenmueller
JM3, Vol. 22, Issue 04, 041406, (July 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041406
KEYWORDS: Optical gratings, Axicons, Air contamination, Vestigial sideband modulation, Scanning electron microscopy, Design and modelling, Optical components, Edge roughness, Electron beams, Electron beam lithography

Proceedings Article | 1 May 2023 Presentation + Paper
E. Linn, S. Fasold, R. Galler, S. Kuefner, I. Stolberg, M. Suelzle, U. Weidenmueller
Proceedings Volume 12497, 1249704 (2023) https://doi.org/10.1117/12.2656928
KEYWORDS: Edge roughness, Optical gratings, Axicons, Electron beam lithography, Optical components, Lithography, Electron beams, Silicon photonics, Scanning electron microscopy, Electron beam direct write lithography

Showing 5 of 21 publications
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