Dr. Ulric B. Ljungblad
at Micronic Laser Systems AB
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 22 January 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Mirrors, Reflection, Cameras, Calibration, CCD cameras, Spatial light modulators, Micromirrors, Photomasks, Optical alignment, Analog electronics

Proceedings Article | 22 January 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Mirrors, Titanium, Optical lithography, Electrodes, Metals, Laser development, Spatial light modulators, Microopto electromechanical systems, Micromirrors, Photomasks

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Mirrors, Reticles, Scanners, Spatial light modulators, Photomasks, Optical proximity correction, Maskless lithography, Raster graphics, Phase shifts

Proceedings Article | 5 September 2001
Proc. SPIE. 4409, Photomask and Next-Generation Lithography Mask Technology VIII
KEYWORDS: Microelectromechanical systems, Mirrors, Deep ultraviolet, Electrodes, Laser development, Spatial light modulators, Micromirrors, Photomasks, Excimer lasers, Line edge roughness

Proceedings Article | 22 January 2001
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Mirrors, Reticles, Laser applications, Spatial light modulators, Microelectronics, Micromirrors, Photomasks, Analog electronics, Semiconducting wafers, Laser systems engineering

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top