Mr. Ulrich Klug Profile

Mr. Ulrich Klug

at Laser Zentrum Hannover eV

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Author

Publications (7)

PROCEEDINGS ARTICLE | February 11, 2011

On the damage behaviour of Al2O3 insulating layers in thin film systems for the fabrication of sputtered strain gauges

Proc. SPIE. 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI

KEYWORDS: Thin films, Optical lithography, Sensors, Metals, Dielectrics, Laser processing, Laser ablation, Laser damage threshold, Adhesives, Pulsed laser operation

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PROCEEDINGS ARTICLE | February 25, 2010

Picosecond laser patterning of NiCr thin film strain gages

Proc. SPIE. 7589, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications X

KEYWORDS: Thin films, Polishing, Optical lithography, Sensors, Metals, Nickel, Diffusion, Laser ablation, Aluminum, Picosecond phenomena

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PROCEEDINGS ARTICLE | February 17, 2010

Polarization converted laser beams for micromachining applications

Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV

KEYWORDS: Polarization, Image segmentation, Silicon, Laser processing, Scanning electron microscopy, Laser ablation, Micromachining, Picosecond phenomena, Pulsed laser operation, Absorption

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PROCEEDINGS ARTICLE | February 25, 2009

Micromachining with picosecond double pulses on silicon and aluminium

Proc. SPIE. 7202, Laser-based Micro- and Nanopackaging and Assembly III

KEYWORDS: Oscillators, Silicon, Semiconductor lasers, Scanning electron microscopy, Laser ablation, Aluminum, Micromachining, Picosecond phenomena, Pulsed laser operation, Plasma

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PROCEEDINGS ARTICLE | February 26, 2008

Laser beam shaping for micromaterial processing using a liquid crystal display

Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII

KEYWORDS: Signal to noise ratio, Diffraction, Stars, Spatial light modulators, Liquid crystal on silicon, LCDs, Quantization, Diodes, Micromachining, Beam shaping

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PROCEEDINGS ARTICLE | July 1, 2005

Mass balancing and spring element manipulation of micromechanical silicon-gyrometers with ultrashort laser pulses

Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II

KEYWORDS: Ultrafast phenomena, Sensors, Calibration, Scanners, Video, Silicon, Laser processing, Semiconductor lasers, Laser ablation, Electronic circuits

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Showing 5 of 7 publications

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