Mr. Ulrich Klug
at Laser Zentrum Hannover eV
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | February 11, 2011
Proc. SPIE. 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI
KEYWORDS: Thin films, Optical lithography, Sensors, Metals, Dielectrics, Laser processing, Laser ablation, Laser damage threshold, Adhesives, Pulsed laser operation

PROCEEDINGS ARTICLE | February 25, 2010
Proc. SPIE. 7589, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications X
KEYWORDS: Thin films, Polishing, Optical lithography, Sensors, Metals, Nickel, Diffusion, Laser ablation, Aluminum, Picosecond phenomena

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Polarization, Image segmentation, Silicon, Laser processing, Scanning electron microscopy, Laser ablation, Micromachining, Picosecond phenomena, Pulsed laser operation, Absorption

PROCEEDINGS ARTICLE | February 25, 2009
Proc. SPIE. 7202, Laser-based Micro- and Nanopackaging and Assembly III
KEYWORDS: Oscillators, Silicon, Semiconductor lasers, Scanning electron microscopy, Laser ablation, Aluminum, Micromachining, Picosecond phenomena, Pulsed laser operation, Plasma

PROCEEDINGS ARTICLE | February 26, 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Signal to noise ratio, Diffraction, Stars, Spatial light modulators, Liquid crystal on silicon, LCDs, Quantization, Diodes, Micromachining, Beam shaping

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Ultrafast phenomena, Sensors, Calibration, Scanners, Video, Silicon, Laser processing, Semiconductor lasers, Laser ablation, Electronic circuits

Showing 5 of 7 publications
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