Dr. Ulrike A. Dauderstädt
Group manager SLM Research at Fraunhofer-Institut für Photonische Mikrosysteme
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Publications (16)

SPIE Journal Paper | September 21, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Mirrors, Micromirrors, Laser irradiation, Spatial light modulators, Microelectromechanical systems, Transmission electron microscopy, Oxides, Pulsed laser operation, Optical lithography, Reflectivity

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Mirrors, Continuous wave operation, Electrodes, Laser applications, Reflectivity, Modulators, Microopto electromechanical systems, Micromirrors, Surface properties, Printed circuit board testing

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Mirrors, Interferometers, In situ metrology, Error analysis, Interferometry, Spatial light modulators, Objectives, Microopto electromechanical systems, Micromirrors, Phase shifts

PROCEEDINGS ARTICLE | February 5, 2010
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Mirrors, Microsystems, Calibration, Resistance, Microopto electromechanical systems, Micromirrors, Convection, Resistors, Temperature metrology, Photonic microstructures

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Actuators, Mirrors, Optical lithography, Deep ultraviolet, Electrodes, Dielectrics, Spatial light modulators, Micromirrors, Aluminum, Laser systems engineering

Showing 5 of 16 publications
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