Ünsal Sökmen
Ph.D. Student at Technische Univ Braunschweig
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Thin films, Etching, Sputter deposition, Electrodes, Crystals, Silicon, Aluminum, Aluminum nitride, Piezoelectric effects

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Thin films, Resonators, Doppler effect, Etching, Electrodes, Silicon, Finite element methods, Bridges, Aluminum, Aluminum nitride

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Oxides, Thin films, Etching, Dry etching, Silicon, Photoresist materials, Silicon films, Thermoelectric materials, Cryogenics, Plasma

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