Dr. Urvi Gururaj Shenoy Profile

Dr. Urvi Gururaj Shenoy

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Publications (2)

SPIE Journal Paper | 1 October 2004

Bulk micromachining of a MEMS tunable Fabry-Perot interferometer: effect of residual silicon on device performance

Rohit Srivastava, Urvi Shenoy, Scott Forrest, Swetha Chinnayelka, J. Mohammed, Ronald Besser, Michael McShane

JM3, Vol. 3, Issue 04, (October 2004) https://doi.org/10.1117/12.10.1117/1.1794707

KEYWORDS: Silicon, Semiconducting wafers, Mirrors, Electrodes, Bulk micromachining, Etching, Infrared spectroscopy, Fabry–Perot interferometry, Infrared radiation, Instrument modeling

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Proceedings Article | 21 June 2002 Paper

Microfabricated interferometer and integrated fluidic channel for infrared spectroscopy of aqueous samples

Rohit Srivastava, Gururaj Shenoy, Scott Forrest, S. Chinnayelka, Ronald Besser, Michael McShane

Proceedings Volume 4626, (2002) https://doi.org/10.1117/12.472107

KEYWORDS: Mirrors, Spectroscopy, Gold, Electrodes, Transmittance, Semiconducting wafers, Silicon, Infrared spectroscopy, Microfluidics, Aluminum

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