Dr. Uthayasankararan Peralagu
R&D Engineer High Speed Analog/RF Technology at imec
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Fin field effect transistors, Germanium, Gallium arsenide, Gallium nitride, Field effect transistors, CMOS technology, Group III-V semiconductors

Proceedings Article | 21 March 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Indium gallium arsenide, Capacitors, Etching, Argon, Atomic layer deposition, Transistors, Plasma etching, Compound semiconductors, Focus stacking software, Plasma

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