Uwe Kramer
at Qimonda Dresden GmbH & Co OHG
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 23, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Signal to noise ratio, Monochromatic aberrations, MATLAB, Calibration, Etching, Manufacturing, Fourier transforms, Image resolution, Scanning electron microscopy, Semiconducting wafers

PROCEEDINGS ARTICLE | April 16, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Lithography, Optical design, Metrology, Sensors, Spectroscopy, Scatterometry, Signal processing, Semiconducting wafers, Wafer testing, Overlay metrology

PROCEEDINGS ARTICLE | April 4, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Signal to noise ratio, Metrology, Statistical analysis, Visualization, Sensors, Calibration, Image acquisition, Interference (communication), Scanning electron microscopy, Critical dimension metrology

PROCEEDINGS ARTICLE | March 24, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Environmental monitoring, Calibration, Scanning electron microscopy, Finite element methods, Optical proximity correction, Computer aided design, Critical dimension metrology, Semiconducting wafers, Electrochemical etching

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Image processing, Pattern recognition, Manufacturing, Inspection, Scanning electron microscopy, Time metrology, Photomasks, Optical proximity correction, Computer aided design, Semiconducting wafers

PROCEEDINGS ARTICLE | March 15, 2006
Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III
KEYWORDS: Lithography, Metrology, 3D modeling, Scatterometry, Data processing, Process control, Critical dimension metrology, Semiconducting wafers, Scatter measurement, Process modeling

Showing 5 of 8 publications
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