Dr. V. R. Reddy
at UGC-DAE Consortium for Scientific Research
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 August 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Reflectors, Multilayers, X-ray optics, Optical lithography, Sputter deposition, X-rays, Silicon, Reflectivity, Atomic force microscopy, Structural analysis

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