Vadim Borisov
at Reutlingen Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 19, 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Lithography, Photomasks, Data modeling, Convolution, Neural networks, Machine learning, Scanning electron microscopy, Data acquisition, Neurons

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