Prof. Vadim A. Shakhnov
at BMSTU
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Microelectromechanical systems, Semiconductors, Particles, Dielectrics, Electrons, Ions, Silicon, Computer simulations, Fractal analysis, Neon

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Lithography, Optical lithography, Metals, Silicon, Computing systems, Computer programming, Very large scale integration, Photomasks, Transistors, Double patterning technology

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Nanotechnology, Nanostructures, Cognitive modeling, Data modeling, 3D modeling, Modeling and simulation, Resistors, Nanoelectronics, Instrument modeling, Carbon nanotubes

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