Dr. Vadim Sidorkin
Sr. Process Engineer at Advanced Mask Technology Ctr GmbH Co KG
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Electron beam lithography, Reticles, Metrology, Photomasks, Extreme ultraviolet

Proceedings Article | 8 October 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Electron beam lithography, Reticles, Data modeling, Visualization, Calibration, Metals, Photomasks, Performance modeling, Overlay metrology, Instrument modeling

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Electron beam lithography, Polymers, Ions, Inspection, Scanning helium ion microscopy, Ion beams, Helium, Nanofabrication, Ion beam lithography, Nanolithography

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