Dr. Vadim Sirotkin
at IMTHPM
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Mathematical modeling, Ultraviolet radiation, Computing systems, Computer simulations, 3D modeling, Numerical analysis, Finite difference methods, Nanoimprint lithography, Motion models, Photoresist processing

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