Dr. Vahagn Sargsyan
at Carl Zeiss SMS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 October 2017
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Statistical analysis, Defect detection, Image processing, Manufacturing, Reliability, Image analysis, Photomasks, Critical dimension metrology, Tolerancing, Defect inspection

Proceedings Article | 28 June 2013
Proc. SPIE. 8701, Photomask and Next-Generation Lithography Mask Technology XX
KEYWORDS: Opacity, Etching, Quartz, Image processing, Atomic force microscopy, Attenuators, Process control, Photomasks, Analytical research, Critical dimension metrology

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