Dr. Vaishali Vohra
Strategic Account Manager at DuPont Electronics & Industrial
SPIE Involvement:
Publications (7)

Proceedings Article | 16 April 2011 Paper
Proceedings Volume 7972, 797206 (2011) https://doi.org/10.1117/12.882843
KEYWORDS: Photoresist developing, Photoresist materials, Polymers, Systems modeling, Semiconducting wafers, Optical lithography, Optical proximity correction, Photomasks, Etching, Nanoimprint lithography

Proceedings Article | 26 March 2010 Paper
Proceedings Volume 7639, 76392W (2010) https://doi.org/10.1117/12.846748
KEYWORDS: Double patterning technology, Lithography, Photoresist processing, Semiconducting wafers, Electroluminescence, Astatine, Semiconductors, Image processing, Etching, Polymers

Proceedings Article | 31 March 2008 Paper
Proceedings Volume 6923, 692307 (2008) https://doi.org/10.1117/12.775542
KEYWORDS: Electron beam lithography, Photoresist processing, Polymers, Semiconducting wafers, Lithography, Immersion lithography, Water, Surface properties, Surface roughness, Thin film coatings

Proceedings Article | 29 March 2006 Paper
Ching Yu Chang, D. C. Yu, J. H. Chen, John C. H. Lin, Burn Lin, James Thackeray, Vaishali Vohra, Gerald Wayton, Tomoki Kurihara
Proceedings Volume 6153, 61530M (2006) https://doi.org/10.1117/12.658416
KEYWORDS: Satellites, Water, Etching, Adhesives, Capillaries, Polymers, Digital watermarking, Photoresist processing, Lithography, Switches

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.535652
KEYWORDS: Photomasks, Cadmium sulfide, Semiconducting wafers, Spiral phase plates, Critical dimension metrology, Optical vortices, Distortion, Optical lithography, Phase shifts, Scanning electron microscopy

Showing 5 of 7 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top