Dr. Vaishali Vohra
Strategic Account Manager at Dow Chemical Co
SPIE Involvement:
Publications (7)

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Optical lithography, Etching, Polymers, Photoresist materials, Photomasks, Optical proximity correction, Nanoimprint lithography, Semiconducting wafers, Systems modeling, Photoresist developing

Proceedings Article | 26 March 2010 Paper
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Image processing, Electroluminescence, Double patterning technology, Photoresist processing, Semiconducting wafers, Astatine

Proceedings Article | 31 March 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Electron beam lithography, Polymers, Water, Surface roughness, Surface properties, Immersion lithography, Thin film coatings, Photoresist processing, Semiconducting wafers

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Switches, Etching, Satellites, Polymers, Water, Capillaries, Digital watermarking, Photoresist processing, Adhesives

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Optical lithography, Distortion, Scanning electron microscopy, Optical vortices, Photomasks, Cadmium sulfide, Critical dimension metrology, Semiconducting wafers, Spiral phase plates, Phase shifts

Showing 5 of 7 publications
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