Valeriano Ferreras Paz
at Univ Stuttgart
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | April 10, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Semiconducting wafers, Silicon, Microscopy, Wavefronts, Illumination engineering, Image enhancement, Metrology, Semiconductors, Image resolution, Scatterometry

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8789, Modeling Aspects in Optical Metrology IV
KEYWORDS: Diffraction, Metrology, Silicon, Silver, Reflectivity, Scatterometry, Near field, Scatter measurement, Electromagnetism, Nanorods

PROCEEDINGS ARTICLE | May 23, 2011
Proc. SPIE. 8083, Modeling Aspects in Optical Metrology III
KEYWORDS: Microscopes, Diffraction, Mirrors, Metrology, Two photon polymerization, Silicon, Photoresist materials, Scatterometry, Critical dimension metrology, Photosensitive materials

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Electron beams, Metrology, Cadmium, Scatterometry, Line width roughness, Critical dimension metrology, Line edge roughness, Electron beam direct write lithography, Semiconducting wafers

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