Valerio Perez
at GLOBALFOUNDRIES Singapore
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 13, 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Data modeling, Scattering, Calibration, Silicon, Manufacturing, Optical proximity correction, Critical dimension metrology, Statistical modeling, Resolution enhancement technologies

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