Dr. Valeriy V. Ginzburg
Research Specialist at Dow Inc
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 27 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Cadmium, Etching, Polymers, Glasses, Silicon, Scanning electron microscopy, Line width roughness, Directed self assembly, Reactive ion etching

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Cadmium, Etching, Dry etching, Polymers, Silicon, Scanning electron microscopy, Line width roughness, Directed self assembly, Line edge roughness, Semiconducting wafers

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Thin films, Optical lithography, Etching, Annealing, Interfaces, Diffusion, Coating, Scanning electron microscopy, Directed self assembly, Thin film coatings

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Wafer-level optics, Lithography, Polymethylmethacrylate, Polymers, Computer simulations, Photoresist materials, Directed self assembly, Chemical analysis, Photoresist processing, Semiconducting wafers

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Thin films, Optical lithography, Polymers, Annealing, Diffusion, Materials processing, Scanning electron microscopy, Directed self assembly, Reactive ion etching, Thin film coatings

Showing 5 of 7 publications
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